The XL-80 system is a laser interferometer calibration with lean design, enabling a four times faster slew rate, ten times higher dynamic data capture rate and total system accuracy, the company says. In a smaller, lighter and more portable package, the system brings nanometer-level motion analysis to calibration, error-mapping and compensation of everything from laboratory equipment, semi-conductor processing machinery and radiosurgery tools to coordinate measuring machines, lithography equipment, advanced machine tools, robots and assembly systems.
Meeting industry trends of high-speed machinery, higher precision and greater process control, the system increases linear measurement speed to 4 m/s, while providing a resolution of 1 nm.
A signal gain switch gives the option of an 80-m linear range (such as for large aircraft profilers) or increased signal strength at shorter ranges. System accuracy of ±0.5 ppm is maintained over the full operating range of 0-40°C.
The system takes readings at 50 kHZ, which is from 5 kHZ more than the company’s previous ML10. The increased bandwidth enables capture of detailed data about small high-frequency movements.
The system is also backward compatible with optics from the company’s ML10 laser system, enabling current ML10 users to upgrade to the new system while retaining their investment in optics, procedures and staff training.