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Heidenhain’s Lida 500 series linear scales are designed for applications requiring ever-smaller components, such as machining parts for the semiconductor or electronics industries. The 20-micronmeter incremental linear scales offer measuring steps of 1 micronmeter to 0.1 micronmenter. Their reduced mass gives them higher dynamic capability, and they are useful when installation space is limited, the company says.
Both the Lida 583 and Lida 573 feature double-field scanning. To compensate for the small scanning field, the signal is corrected online electronically to produce better signals. Glass scales are the measuring standard, and each encoder has a reference mark at the midpoint. Accuracy grade is ±5 micronmeters. The scales are resistant to contamination and easy to mount, the company says.