Zygo's Nexview 3D profiler performs non-contact surface metrology for smooth and rough samples for both production and scientific research applications. Sub-nanometer vertical resolution at all magnifications maintains precision during changes in field of view, the company says. The system's noncontact 3D technology is designed to safely measure fragile and transparent materials without altering their surface, providing ISO 25178 standard surface topography results. With a 200-mm XY travel stage accommodating 20-lb parts and a 100-mm vertical travel with integrated head riser, the profiler can inspect samples as tall as 160 mm. In addition, XYZ and tilt staging are fully automated with seamless measurement field stitching, and a through-lens focus aid eases part setup. For stability, the machine includes the company's SureScan technology and scanner-based protection for accidental objective lens crashes.
Using the company's Mx software, the profiler produces high-fidelity surface topography maps for measuring roughness, flatness, angles, films and steps. In addition to providing system control, data analysis and measurement navigation, the platform is said to simplify workflow-based setup and measurements with its Advanced Analysis Tool pop-out data viewer.
With software application recipes, a range of objective magnifications and built-in automation capability, the profiler supports multiple parts and setups. Recipe changes take minutes to configure, according to the company, and software modules for measurement in the presence of transparent films and 2D vision analysis are available for expanded functionality.