Coherent has added a new model to its family of compact excimer lasers that offers a higher repetition rate (2 kHz) for increased throughput. In addition, the fully Semi S2-certified IndyStar 2 kHz laser incorporates several new output stabilization features for improved processing. This makes them well-suited for semiconductor fabrication, testing, inspection and micromaterials processing facilities. The laser is offered with a choice of 193 nm (ArF) output where it delivers 8 W of stabilized power, or 248 nm (KrF) output with 12 W of stabilized power.
The laser delivers faster and better results for semiconductor applications such as photomask inspection and testing photolithography optics. It also enables other high speed processes including precision material ablation tasks and high-value marking applications.
The laser uses an advanced electronics platform enabling two important new stabilization features called Powerlok and Timelok. The Powerlok feature ensures a constant pulse of energy with each single-laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. Timelok provides superior trigger-to-pulse delay stability, supporting tight synchronization with other equipment. Plus all the lasers continue to offer the lowest cost of ownership, in large part because of their use of field-proven ALMETA (All-Metal-Ceramic) tube technology which delivers high reliability and longevity. With 193-nm operation, the laser shows a tube/optics lifetime exceeding 10 billion laser pulses, which translates into hands-free operation of more than one year.
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